Crucible Fab Energy

HUMANIS

Fab energy - dry-etch bay

Policy selection

Configuration

Safety shield

Checks every rest or sleep instruction against the lots already committed to arrive: a chamber may power down only if every such lot still starts inside the wake-up wait limit and its Q-time margin, the OEM cap on sleep entries holds, and the ready floor per recipe family holds. ACTIVE refuses and wakes ahead; OBSERVE only logs what it would do.

00:00